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MEMS and Nanotechnology

Design of a MEMS Capacitive Comb-drive Accelerometer

T. Kaya[1], B. Shiari[2], K. Petsch[1], and D. Yates[2]
[1]Central Michigan University, School of Engineering and Technology, Mount Pleasant, MI
[2]University of Michigan, Dept. of Electrical Engineering and Computer Science, Ann Arbor, MI

In this work, a MEMS low-g accelerometer with three sensitive directions is designed for health monitoring applications. The accelerometer may have different sensitivity in different axes. The proof-mass of the device is suspended by four serpentine springs, and the comb drive structure ... Mehr lesen

Simulations of MEMS Based Piezoresistive Accelerometer Designs in COMSOL

N. Bhalla[1], S. Li[2], and D. Chung[1]
[1]Chung Yuan Christian University, Taiwan, (R.O.C)
[2]National Tsing Hua University, Taiwan, (R.O.C)

Different configurations of MEMS based accelerometer has been made and analysed using COMSOL Multiphysics. The designs presented in this paper consist of a square shaped proof mass with flexures supporting it. Different position and varied number of supporting flexures attached to the ... Mehr lesen

Coupled Electromagnetic - Dynamic FEM Simulation of A High Frequency MEMS Energy Harvester

E. Topal
Middle East Technical University
Ankara
Turkey

In this study, a detailed finite element model coupling the motion dynamics and electromagnetics of a diaphragm based MEMS vibration energy harvester is presented. The energy harvester converts low frequency vibrations to high frequency response by magnetic actuation of a diaphragm ... Mehr lesen

Multi-Domain Analysis of Silicon Structures for MEMS Based-Sensors

N. Bhalla[1], S. Li[2], and D. Chung[1]
[1]Chung Yuan Christian University, Chungli,Taiwan
[2]National Tsing Hua University, Hsinchu, Taiwan

Investigation in this paper aims at performing Mechanical Stress Strain analysis, Thermal, Piezoresistive and Piezoeletric analysis of Silicon Structures using COMSOL. The simulation results have been cross checked by mathematical calculation. Mehr lesen

Combined Analytical and Numerical Modeling of a Resonant MEMS Sensor for Viscosity and Mass Density Measurements

S. Cerimovic[1], R. Beigelbeck[2], H. Antlinger[3], J. Schalko[2], B. Jakoby[3], and F. Keplinger[1]
[1]Institute of Sensor and Actuator Systems, Vienna University of Technology, Vienna, Austria
[2]Institute for Integrated Sensor Systems, Austrian Academy of Sciences, Wiener Neustadt, Austria
[3]Institute for Microelectronics and Microsensors, Johannes Kepler University Linz, Linz, Austria

A resonant MEMS sensor for viscosity and mass density measurements of liquids was modeled. The device is based on Lorentz-force excitation and features an integrated piezoresistive readout. The core sensing element is a rectangular vibrating plate suspended by four beam springs. The ... Mehr lesen

Effect of Mass Adsorption on a Resonant NEMS

J. J. Ruz Martinez
Instituto de Microelectronica de Madrid
Tres Cantos
Madrid, Spain

The motion of a resonant NEMS has been widely studied for many different applications such as structural mechanics in engineering, ultra sensitive mass spectrometers or the well known Atomic Force Microscope. The study of the eigenfrequencies of such structures is very important, and ... Mehr lesen

COMSOL API Based Toolbox for the Mixed-Level Modeling of Squeeze-Film Damping in MEMS: Simulation and Experimental Validation

M. Niessner[1], G. Schrag[1], J. Iannacci[2], and G. Wachutka[1]
[1]Institute for Physics of Electrotechnology, Munich University of Technology, Munich, Germany
[2]MEMS Research Unit, Fondazione Bruno Kessler, Povo di Trento, Italy

We present an easy-to-use toolbox for the automated generation of reduced-order mixed-level models for the evaluation of squeeze-film damping in microelectromechanical systems. The toolbox is programmed in JAVA and heavily exploits the functionality provided by the COMSOL API. The ... Mehr lesen

Ferromagnetic Materials for MEMS- and NEMS-Devices

A. Weddemann, J. Jadidian, S. Khushrushahi, Y. Kim, and M. Zahn
Research Laboratory of Electronics
Massachusetts Institute of Technology
Cambridge MA

The modeling of ferromagnetic materials is a challenging task of high industrial and academic impact. Thin film and granular systems form the basis of novel spintronic devices such as modern hard drives with a high data area storage density. In order to push the current limits even ... Mehr lesen

Simulating Frequency Nonlinearities in Quartz Resonators at High Temperature and Pressure

A. Beerwinkle[1], R. Singh[1], and G. Kirikera[2]
[1]Mechanics of Advanced Materials Laboratory, School of Mechanical and Aerospace Engineering, Oklahoma State University, Tulsa, OK
[2]Geophysical Research Company, LLC, (GRC) Tulsa, OK

A three-dimensional finite element model, based on the linear field equations for superimposed small vibrations onto nonlinear thermoelastic stressed media given by Lee and Yong, was developed. This method involves solving the thermal stress and piezoelectric model with geometric and ... Mehr lesen

Magnetic Nanoparticles for Novel Granular Spintronic Devices

A. Regtmeier[1], A. Weddemann[2], I. Ennen[3], and A. Hütten[1]
[1]Dept. of Physics, Thin Films and Physics of Nanostructures, Bielefeld University, Bielefeld, Germany
[2]Dept. of Elect. Eng. and Comp. Science, Lab. for Electromagnetic and Electronic Syst., MIT, Cambridge, MA
[3]Institute of Solid State Physics, Vienna University of Technology, Vienna, Austria

Superparamagnetic nanoparticles have a wide range of applications in modern electric devices. Recent developments have identified them as components for a new type of magnetoresistance sensor. We propose a model for the numeric evaluation of the sensor properties. Based on the solutions ... Mehr lesen

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