Coupled Electromagnetic - Dynamic FEM Simulation of A High Frequency MEMS Energy Harvester
Veröffentlicht in 2011
In this study, a detailed finite element model coupling the motion dynamics and electromagnetics of a diaphragm based MEMS vibration energy harvester is presented. The energy harvester converts low frequency vibrations to high frequency response by magnetic actuation of a diaphragm carrying coils.
AC/DC, Solid Mechanics and Moving Mesh (ALE) modules are coupled together in one 3-D model to analyze the performance of the MEMS vibration energy harvester. A peak-to-peak voltage of 7mV and a peak electrical power of 1.4 µW can be generated from the electromagnetic device having a volume of roughly 0.25 cm3.
Herunterladen
- topal_paper.pdf - 0.32MB