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Combined Analytical and Numerical Modeling of a Resonant MEMS Sensor for Viscosity and Mass Density Measurements

S. Cerimovic[1], R. Beigelbeck[2], H. Antlinger[3], J. Schalko[2], B. Jakoby[3], and F. Keplinger[1]
[1]Institute of Sensor and Actuator Systems, Vienna University of Technology, Vienna, Austria
[2]Institute for Integrated Sensor Systems, Austrian Academy of Sciences, Wiener Neustadt, Austria
[3]Institute for Microelectronics and Microsensors, Johannes Kepler University Linz, Linz, Austria
Veröffentlicht in 2011

A resonant MEMS sensor for viscosity and mass density measurements of liquids was modeled. The device is based on Lorentz-force excitation and features an integrated piezoresistive readout. The core sensing element is a rectangular vibrating plate suspended by four beam springs. The liquid surrounding the plate influences the resonant behavior of the system.

Thus, evaluating the properties of the resonant system allows estimation of the viscosity and the mass density of the liquid. In this work, we present a semi-numerical approach that combines advantages of analytical and FEM modeling. The good agreement between measured and simulated results indicates that such simulations are a convenient method to predict the sensor characteristic.

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