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Tunable MEMS Capacitor for mm and μm Wave Generation

Arpita Das[1], Amrita Nandy[1], Sakuntala Mahapatra[1], Sk. Mohammed Ali[1], Minu samantary[1]
[1]National MEMS design centre ,Department of Electronics and Telecommunication, Trident Academy of Technology, Biju Pattnaik University of Technology , India
Veröffentlicht in 2013

This paper demonstrates the design of a tunable MEMS capacitor with two plates (one movable and one fixed). The response time obtained is 5μs. The tunable capacitor plays an important role in RF circuits. We focus on a tunable capacitor simulated using COMSOL Multiphysics®. In an electrostatically tunable parallel plate capacitor, you can modify the distance between the two plates when the applied voltage changes. The capacitor includes a spring that attaches to one of the plates for the tuning of the distance between the plates. If you know the characteristics of the spring and the voltage between the plates, you can compute the distance between the plates. This model includes an electrostatic simulation for a given distance.

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