Simulation Study of High Frequency Pulsed DC Discharges in Nitrogen
Veröffentlicht in 2017
Pulsed DC technology has led to the design of cost-effective deposition systems and to improved film properties, compared to conventional rf systems. In this work, a two-dimensional finite element model is used to investigate the high frequency pulsed DC discharges in nitrogen. The study is performed using the Plasma Module of COMSOL Multiphysics@. The densities of all the plasma species are obtained. The temporal evolutions of averaged electron density, averaged electron temperature, and averaged densities of ions and neutrals are presented. The effects of pulse frequencies and duty cycle ratios on plasma properties are examined.
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