Parametric Simulation of PZT Diameter to Hole Ratio for Optimized Membrane Displacement
Veröffentlicht in 2015
For our simulation we used the Piezoelectric Devices interface. The structure was set with (clamped) fix constraint boundaries to both ends. The bottom electrode was set to be the ground for the electrostatic physics and the top electrode was set to be a Terminal with potential of 10V. A parametric sweep study was set to change the geometry, the parameters to change was the hole diameter (Holed) and the piezoelectric stack layer (PZTd).
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- arevalo carreno_poster.pdf - 3.13MB
- arevalo carreno_paper.pdf - 1.57MB
- arevalo carreno_abstract.pdf - 0.13MB