Veröffentlichungen und Präsentationen

This paper reports the simulation of micro-electro-mechanical system (MEMS) cleanroom for the purpose of determining the effect of particulate contaminants on the static stress response of cantilever type MEMS devices, such as high precision MEMS pressure sensor. The contaminant presence has been qualitatively verified through computational fluid dynamic simulation of the clean room in COMSOL Multiphysics environment and quantitatively estimated for adverse conditions such as ISO-8 cleanliness. The typical cross-section of cleanroom with machine tables, machines on them and operators has been approximated as a two-dimensional model. Initially the sharp edges of the tables and human models gave convergence problems and when the sharp edges have been converted to rounded edges with certain radius, convergence became possible.