Integrated Ion Optics Design
Introduction: This study aims the optimization and sensitivity analysis of an existing device. A Secondary Ion Mass Spectrometer (SIMS) device is to be equipped with a high power laser in order to increase sputtering speed. The modified device must be capable of handling the increased level of contamination and energy spread of sample ions.
Use of COMSOL Multiphysics® software: Transmission probability was calculated by the Particle Tracing Module. The model parameters were via LiveLink™ for MATLAB® using genetic algorithm for optimization.
Results: The geometric optimization increased the transmission by 40%, although all electrodes suffered minor modifications except for the last energy filter. Sensitivity analysis resulted less than 15% loss for reasonable(0.1mm) production tolerances.
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