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FEM Study on Contactless Excitation of Acoustic Waves in SAWDevices

A. K. Namdeo[1], N. Ramakrishna[2], H. B. Nemade[1,2], and R. P. Palathinkal[1]

[1] Department of Electronics and Communication Engineering, Indian Institute of Technology Guwahati, Assam, India
[2] Centre for Nanotechnology. Indian Institute of Technology Guwahati, Assam, India
Veröffentlicht in 2009

In this paper a finite element method(FEM) study of a surface acoustic wave (SAW)device excited by electrostatic coupling method is performed by using COMSOL Multiphysics. We have modeled a Rayleigh wave type SAW device by choosing YZ Lithium niobate as the substrate. The effect of external radio frequency (RF) field to the SAW device is analyzed. The effect of distance between the contactless electrodes and the SAW device is simulated and the amplitude of the propagating SAW is analyzed. An IDT structure to realize the electrostatic coupling of signals by using the contactless electrodes is discussed.

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