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Design of an Electrodynamically Actuated Microvalve Using COMSOL Multiphysics® and MATLAB®

M. Williams, J. Zito, J. Agashe, A. Sopeju, and D. Arnold
University of Florida, Gainesville, USA
Veröffentlicht in 2008

This paper describes the design of a normally closed, electrodynamic microvalve.  Magnetic forces between a permanent magnet in the valve cover and a soft magnet in the valve seat hold the valve closed.  The combination of electrodynamic actuation and a mechanical restoring spring are used to open the valve.  A device model and a design optimization strategy using COMSOL Multiphysics® and the MATLAB® Optimization Toolbox are presented.  The theoretical performance of the optimized valve is calculated and shows that a maximum static pressure approaching 1 MPa is achievable.

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