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Electrostatic MEMS resonators. 2D example from COMSOL library isn't correct??
Posted 23.05.2014, 19:40 GMT-4 MEMS & Nanotechnology, MEMS & Piezoelectric Devices Version 4.4 0 Replies
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I was just browsing over the COMSOL library of Electromechanical Interface.
Analyzing this example "biased resonator 2D freq" I have noticed that frequency response of the vibration amplitude does not look correct to me. The resonant frequency of the resonating structure is 7.8 MHz.And the author plots the Y component of the displacement field, which is v (see picture 1) and represents the amplitude of the displacement as far as I understand.
Then he compares this response to the one published in the reference (see pdf to the example) claiming the response looks like the transmission of the resonator (see picture 2). Unfortunately, I don't see the necessity of the amplitude and the transmission curve to look the same.
At the same time the frequency response of the amplitude of the real analyzed resonator looks like it supposed to look. 1 clear resonance peak. (see picture 3).
Am I just not getting what COMSOL really means by displacement field or there is smth else wrong? Any help would be pretty much appreciated. Thank you in advance.
Cheers,
Olzhas
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Hello Olzhas Tazabekov
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