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How to simulate a thermal pressure sensor
Posted 04.02.2014, 21:21 GMT-5 MEMS & Nanotechnology, Heat Transfer & Phase Change, MEMS & Piezoelectric Devices Version 4.3b 0 Replies
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I'm trying to simulate a MEMS PIRANI sensor in comsol and got stuck for a long time. Here is a brief introduction about what I want to do:
If the pressure of a confined tiny chamber which has a heater (in my model is the polysilicon beam heated by Joule heating) inside descends, the heat dissipated by the surrounding air will decrease due to the decrease of air density. Thus, when reach equilibrium the heater should have different temperature as a result of different pressure in the chamber.
In the model I set the bottom of the chamber at constant temperature so it can serve as a heat sink. And I applied volume force to let air in chamber dissipate heat generated by the beam.
Things are not working well so I hope if someone can figure out something wrong in my model. I didn't find any similar tutorials so I was like walking blindly in dark. Really really appreciate any help!
Attached is my 2D model. I also have a 3D one but it's too big.
Thanks,
Troy
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Hello Yuxi Zhang
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