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How to do contact analysis for MEMS switches in COMSOL?

Posted 28.10.2013, 07:01 GMT-4 MEMS & Nanotechnology, MEMS & Piezoelectric Devices Version 4.3b 0 Replies

Sarath Gopalakrishnan
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I tried to simulate a MEMS switch, sweeping the voltage so as to bring the top electrode and bottom electrode into contact. However, once the sweep exceeded a particular voltage around which the top electrode was supposed to make contact with the bottom electrode, the top electrode penetrated through the bottom electrode. What boundary condition should be changed so that the moving domain is prevented from penetrating into adjacent domains?
I would really appreciate it if anyone can help me on this issue.
Thanks in advance.
0 Replies Last Post 28.10.2013, 07:01 GMT-4
COMSOL Moderator

Hello Sarath Gopalakrishnan

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