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Piezoresistive Beam
Posted 29.08.2012, 15:53 GMT-4 MEMS & Nanotechnology, MEMS & Piezoelectric Devices, Modeling Tools & Definitions, Parameters, Variables, & Functions, Studies & Solvers, Structural Mechanics Version 4.3 1 Reply
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I am really confused about the results and I need to take a look at one example.
When I model a beam with Si3N4 and P doped silicon in Electromechanical module I get reasonable value for deflection but in this module I can not measure change on current (or resistance due to deflection)
When I model the same beam in Piezoresistive module the deflection is far beyond reasonable values (like 10^8 more!!)
I have no idea what is the problem.
Hello Bahar
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