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Unequal electrostatic force for a MEMS switch

Posted 12.04.2012, 14:40 GMT-4 MEMS & Nanotechnology, MEMS & Piezoelectric Devices Version 3.5a 0 Replies

Sijing Han
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Hello all,

I am trying to model a MEMS switch using Solid, Stress-Strain, Moving Mesh and Electrostatics (emes). The switch is constructed by two bridges with two electrodes on them. A thin insulator layer is coated on one electrode to prevent short. I applied voltage on the electrodes and electrostatic force causes the bridges move close. The electrostatics forces on two bridge should be equal in opposite sign. However, postprocessing result showed one is larger than the other one. Does anyone have ideas on the problem? I attached image for the structure.

Thanks!

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0 Replies Last Post 12.04.2012, 14:40 GMT-4
COMSOL Moderator

Hello Sijing Han

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