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Creating a new coordinate system for a silicon orientation, Piezoresistive Effect

Posted 26.03.2012, 23:41 GMT-4 Low-Frequency Electromagnetics, MEMS & Nanotechnology, MEMS & Piezoelectric Devices, Structural Mechanics Version 4.2 0 Replies

Adrian Rendon
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Hi there,

I'm working in a piezoresistive simulation (Silicon Single-Crystal), as I understand, the silicon material of my sensor is oriented in the <110> direction, so I need a local coordinate system to fulfill that condition.

I would like to know how can I get that local coordinate system in COMSOL v4.2, I have already done that in V3.5a using a Silicon Orientation with x-axis direction vector ([1 1 0]) and xy-plane direction vector ([-1 1 0]). But I don't know how to obtain the same result in v4.2

Thanks in advance if somebody helps.
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Adrian.
0 Replies Last Post 26.03.2012, 23:41 GMT-4
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