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RF MEMS Switch design and simulation ?

Lakshmi Narayana Thalluri

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I am designing RF MEMS Switch, for that i need to solve two physics i.e. electromechanics and electromagnetics. And i need to use the results of the electromechanics to solve electromagnetic physics. i doing the entire project in COMSOL tool.

now my questions are:

1. In electromechanics::: I kept the gap between the cantilever the the base is 1 um, but when i apply the actuation voltage i am getting the displacement more than 2.2um for 5v actuation voltage, here base material is silicon dioxide in solid state . [shown in figure 1]

2. In electromagnetics::: the rf input signal is not propagating to output through displaced cantilever , here i tried to match the impedance using lumped element option but there is no use. [Shown in Figure 2]

3. how to use the results of one physics (Structural Displacement in this example) as the initial values of electromagnetic physics, because the rf input signal need to propagate using deformed cantilever structure. [shown in figure 3]


0 Replies Last Post 25.08.2016, 16:24 GMT-4
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Hello Lakshmi Narayana Thalluri

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