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How to get resulting equations in Plasma Module

Posted 01.11.2010, 02:51 GMT-4 1 Reply

Evgeniy T
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I want know equations used in Plasma Module?

What the physics used in Plasma Module?
1 Reply Last Post 01.11.2010, 15:57 GMT-4
Daniel Smith COMSOL Employee

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Posted: 1 decade ago 01.11.2010, 15:57 GMT-4
Hi Evgeniy, the plasma module solves a pair of drift diffusion equations for the electron density and mean electron energy, an extended form of the Maxwell-Stefan equations for the ions and neutrals and Poisson's equation for the electrostatic potential. For inductively coupled plasmas an additional PDE is solved for the magnetic vector potential. For microwave plasmas the wave equation is also solved.

The equations and boundary conditions are all detailed in the Plasma Module user's guide.
Hi Evgeniy, the plasma module solves a pair of drift diffusion equations for the electron density and mean electron energy, an extended form of the Maxwell-Stefan equations for the ions and neutrals and Poisson's equation for the electrostatic potential. For inductively coupled plasmas an additional PDE is solved for the magnetic vector potential. For microwave plasmas the wave equation is also solved. The equations and boundary conditions are all detailed in the Plasma Module user's guide.

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