M_h 36 "num of holes along length" N_h 6 "num of holes along width" h0 1.6[um] "Gap height" l_h 15[um] "length of hole (thickness of plate)" l_pl 370[um] "length of plate" w_pl 65[um] "width of plate" s_h 6[um] "Side of square hole" s_1 w_pl/(N_h+1)-s_h "distance between holes" s_2 s_1+s_h/2 "distance between hole and edge of plate" s1p l_pl/(M_h+1)-s_h "" s2p s1p+s_h/2 "" pitch__ s_h+s_1 "" l_per l_pl-2*(s2p-s1p) "length of perforated region" w_per w_pl-2*(s_2-s_1) "width of perforated region" r0 sqrt(l_per*w_per/M_h/N_h/pi) "unit disc radius" ri s_h/sqrt(pi) "equivalent radius of hole" dhND 0.05 "Fractional gap height change" dh dhND*h0 "Change in gap height" mu0 1.8e-5[Pa*s] "Gas viscosity" f0 10000[Hz] "Vibration frequency" vf 2*pi*f0*dh "velocity of wall" pRef 1[atm] ""