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Thin Film BAW resonator Analytical Model

Posted 08.11.2015, 14:21 GMT-5 MEMS & Nanotechnology, MEMS & Piezoelectric Devices, Materials, Modeling Tools & Definitions, Parameters, Variables, & Functions Version 5.0 0 Replies

Tithi
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Hi,

I am trying to simulate a Thin Film BAW resonator. I would like to know the analytical equations relation Q-Factor, Displacement and Admittance to the physical dimensions of a BAW resonator, so that accordingly I can try new variations and simulate the response.
Kindly help me with the analytical model used to make the BAW resonator model in the COMSOL Model Library.

Thank you
Tithi
0 Replies Last Post 08.11.2015, 14:21 GMT-5
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