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MEMS
Posted 14.12.2022, 17:50 GMT-5 MEMS & Piezoelectric Devices 0 Replies
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hello ,i am beginner ,I'm designing an accelerometer and calculating the sensitivity of the accelerometer's electrode capacitance to applied acceleration. I did a stationary study and applied acceleration (0,0.02,1) g, I don't know how to get the global evaluation matrix for the capacitance, I only have results that depend on the solid mechanics . the seconde question, if i want to apply SPL inputs with fixed frequency to accelerometer , which type of physics should i use
Hello Auma D
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