Discussion Closed This discussion was created more than 6 months ago and has been closed. To start a new discussion with a link back to this one, click here.

thermo-mechanical stresses in MEMS measured by thin film strain guages

Please login with a confirmed email address before reporting spam

Hi guys,
how is the relation between the stresses induced in multilayer MEMS (dielectric layers on silicon wafer) and elecctrical resistance measured via thin film strain guages(surface machined) in MEMS-stack.
i need your ideas....
Regards

0 Replies Last Post 18.08.2011, 10:25 GMT-4
COMSOL Moderator

Hello umer sajjad

Your Discussion has gone 30 days without a reply. If you still need help with COMSOL and have an on-subscription license, please visit our Support Center for help.

If you do not hold an on-subscription license, you may find an answer in another Discussion or in the Knowledge Base.

Note that while COMSOL employees may participate in the discussion forum, COMSOL® software users who are on-subscription should submit their questions via the Support Center for a more comprehensive response from the Technical Support team.