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Deformation of silicon membrane / capacity
Posted 31.07.2011, 17:00 GMT-4 Low-Frequency Electromagnetics, MEMS & Nanotechnology, MEMS & Piezoelectric Devices, Geometry, Mesh, Structural Mechanics Version 4.1, Version 4.2 0 Replies
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this really drives me crazy.
I have a silicon membrane with a pressure load on it.
The structural mechanics module computes the deformation quite nice.
In the next step I want to export the deformed geometry of the membrane to the electrostatics module to compute the
capacity between the deformed membrane and the ground plate.
I tried it with moving mesh and the u,v variables from the deformation field but nothing happens.
If someone could help me out there this would be great
Thanks
Hello Tobias Hero
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