Simulating Vacuum Systems in COMSOL Multiphysics®
Länge: 46:18
Vacuum technology plays a major role in:
- Semiconductor and MEMS device fabrication
- Electron microscopy
- Mass spectrometry
- Particle accelerator physics
The use of simulation to design such technology can help improve understanding, decrease prototyping costs, and speed up development.
Watch this archived webinar to get an introduction to modeling vacuum systems with the Molecular Flow Module, an add-on to COMSOL Multiphysics®.
Learn more about the Molecular Flow Module here.
Kapitelauswahl
Introduction (00:00)
Tools for Vacuum System Simulation in COMSOL® (01:50)
Deciding Which Tool to Use (03:46)
Visualization of the Knudsen Number Regimes (08:13)
The Free Molecular Flow Interface (09:39)
The Angular Coefficient Method (15:53)
Quasistatic Approximation (21:22)
Total Accommodation at Boundaries (24:39)
Note on Pressure as a Volumetric Quantity (35:11)
Types of Wall Boundary Condition (37:20)
Modeling Chamber Pump Down (37:37)
Transitional Flow (39:00)
Monte Carlo Modeling of Rarefied Gas Flows (40:35)