Modeling of Near-Field Ultrasonic Levitation: Resolving Viscous and Acoustic Effects
Ultrasonic levitation is a novel technology for contactless handing of various objects. It is already used in various manufacturing processes where it is important to keep untouched surface. In this paper we introduce a model of so-called near-field ultrasonic levitation which allows flying heights of the hundred-micron order. Our model computes air flow in the gap between a vibration source and a levitating object and calculates the total lifting force. The model is based on certain assumptions which simplify the general governing equations of air flow. In contrast to existing models, our approach resolves both viscous and acoustic (inertial) effects of the flow. The model is implemented via equation-based mode of COMSOL Multiphysics®. The resulting lifting force is compared to experiment showing good agreement.
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