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Modeling and Characterization of Piezoelectric Structures: From Bulk Material to Thin Film

M. Bavencoffe [1], N. Tembhurnikar [1], B. Negulescu [2], J. Wolfman [2], G. Feuillard [1]
[1] INSA Centre Val de Loire, GREMAN, UMR CNRS 7347, 3 rue de la Chocolaterie, 41034 Blois, France
[2] François Rabelais University, GREMAN, UMR CNRS 7347, Parc de Grandmont, 37200 Tours, France
Veröffentlicht in 2016

With the development of micro and nanotechnologies, integrated structures based on piezoelectric thin films are widely investigated and their characterization become a crucial issue for the development of new applications. A laser interferometry is here used to assess the mechanical response in quasistatic regime of a piezoelectric sample. To complete this experimental approach, a numerical study based on the finite element method is carried out thanks to COMSOL Multiphysics® FEA software. We specifically model three piezoelectric samples in 3D: a PZ27 ceramic rod (with dimensions 2x2x15 mm), a PZ27 ceramic cylinder (20mm diameter, 2 mm thick) and a 240 nm PbZr0.52Ti0.48O3 film covered by a Pt electrode laid on a Si (100 oriented)/SiO2/TiO2/Pt structure. For each sample, a time dependent analysis is performed.

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