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Do the modules in comsol consider the space charge effect when simulating the tracks of charged particle beam?

Posted 13.04.2015, 10:10 GMT-4 Low-Frequency Electromagnetics 0 Replies

Gaoteng Wang
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Hi, i'm a beginner in comsol, it is my first time when i went to a lecture which introducing comsol that i realized comsol is a so powerful tool for engineering.

Then i exploring the website and find that the particle tracking module maybe useful for me. But i'm not sure that when calculating the tracks of charged particle beam, does the space charge effect considered by the module?

It is well known that the space charge effect is very important especially when the energy of charged particle beam is low.

And the industrial application of the low energy charged particle beam is ion implantation which is one of the core technologies for modern IC manufacturation
0 Replies Last Post 13.04.2015, 10:10 GMT-4
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Hello Gaoteng Wang

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