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Note: This discussion is about an older version of the COMSOL Multiphysics® software. The information provided may be out of date.

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Piezoresistive Pressure Sensor

Posted 08.03.2015, 12:37 GMT-4 MEMS & Nanotechnology, MEMS & Piezoelectric Devices Version 4.4 2 Replies

Tamim Al Mahruz
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Can anyone help me out about the temperature analysis of Piezoresistive Pressure Sensor?
I used thermal expansion in the linear elastic material > sweep the operation temperature.
But output voltage barely change with the differential pressure input.
I know the concept which said it should be higher & lower than 52mV (this is default for this model) during the sweeping.
So how can i find the desired one??
Any help will be appreciated.....
2 Replies Last Post 13.03.2015, 01:33 GMT-4
Rogelio Hernandez Aguirre
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Posted: 10 years ago 12.03.2015, 14:46 GMT-4
Hi Tamim,

Have you figured how to do it? I am modeling my piezoresistive pressure sensor too, and I am looking to apply temperature and see the change on the output but I do not know how.

Regards

Rogelio
Hi Tamim, Have you figured how to do it? I am modeling my piezoresistive pressure sensor too, and I am looking to apply temperature and see the change on the output but I do not know how. Regards Rogelio
Tamim Al Mahruz
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Posted: 10 years ago 13.03.2015, 01:33 GMT-4
Still finding a way out.
I have already told the procedure that i used but the output varies very narrowly.
In the mean time, can you tell me if i can create a new piezoresistive model using geometry??
Still finding a way out. I have already told the procedure that i used but the output varies very narrowly. In the mean time, can you tell me if i can create a new piezoresistive model using geometry??

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