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Stiffness matrix of Si in (111) plane

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Hi everyone

I want to simulate a resonator on a silicon (111) wafer, so I need the stiffness matrix in this plane. COMSOL provides the stiffness matrix in (100). So I tried Ville's matlab file (www.kaajakari.net/~ville/research/tutorials/elasticity_tutorial.pdf) and used changed rotation matrix to obtain the stiffness matrix in (111). The rotation matrix I used is

% Rotation matrix
Q=[
[-1/sqrt(6) -1/sqrt(6) 2/sqrt(6)];
[ 1/sqrt(2) -1/sqrt(2) 0];
[ 1/sqrt(3) 1/sqrt(3) 1/sqrt(3)];
];

But the result looks not right. Could anyone tell me what the problem is and how to solve this? Thanks.

James

1 Reply Last Post 11.10.2015, 15:39 GMT-4
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Hello James

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Posted: 9 years ago 11.10.2015, 15:39 GMT-4
Dear James,

Can you tell me what makes your result not look right? What are you exactly getting? A constant Young's modulus?
Dear James, Can you tell me what makes your result not look right? What are you exactly getting? A constant Young's modulus?

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