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Meshing MEMS switches with narrow air gaps and thin layers
Posted 27.10.2013, 01:46 GMT-4 MEMS & Nanotechnology, RF & Microwave Engineering, MEMS & Piezoelectric Devices Version 4.3b 0 Replies
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I was trying to run a parametric sweep on a MEMS switch design. It consists of a top beam(1um thick), a bottom electrode (2um thick), an oxide layer(0.1um thick) on top of the bottom electrode and air gap of 2um separating the oxide layer and the top beam. I created a big air box to encompass all the domains.
At first, I tried to mesh it together, but it was showing errors like "Failed to respect the boundaries". This error was connected with the edges of the oxide layer. So, I tried to mesh individual domains in different meshes. Nevertheless, the simulation is unsuccessful and is returning this error.
Failed to find a solution for the initial parameter.
In segregated group 3:
Very ill-conditioned preconditioner.
The relative residual is more than 1000 times larger than the relative tolerance.
Returned solution is not converged.
I tried to play around with the tolerance factor and residual factor in the study>solver configuration>solver>stationary solver>segregated. It did not work out. Anyone has faced the same issue? How to rectify this? Thanks in advance.
Hello Sarath Gopalakrishnan
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