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Laser-induced heating of thin film structures
Posted 05.10.2023, 15:10 GMT-4 Heat Transfer, Geometry, Mesh Version 6.1 2 Replies
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Hi, guys. I am the very new user who started using comsol few days ago.
I am trying to simulate the temperature distribution of thin film multilayer structure under laser heating with 2d axisymmetric geometry. I can successfully formulate the heating effect at each layer.
However, I got the problem during the meshing. The thickness of each layer is under 1 nm (smallest one with 0.1 nm), and the thickness of the wafer is mm-scale.
Due to significant difference in the scale of the thickness, it is hard to mesh the boundaries.
I hope to know whether there exists the similar reference, or sample exists, or there exists a methods to reduce the size with any boundary conditions.
Thank you in advance.
Jaeyu
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Dear Jaeyu Kim
I recommend you to use thin layer feature. Please see the following link. You can see how this functionality works for modeling thin structure
https://www.comsol.com/model/composite-thermal-barrier-13723
Sincerely Junseong Lee.
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I recommend you to use thin layer feature.
Depending on the geometry a swept mesh is another option.