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Error in On-state Capacitance value of MEMS capacitive switch
Posted 31.08.2016, 16:38 GMT-4 MEMS & Nanotechnology, MEMS & Piezoelectric Devices, Structural Mechanics Version 5.2 1 Reply
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Hello,
I am simulating a MEMS capacitor. The pull-in voltage of the device is 1.5V. I used the stationary study to find out the C11(terminal capacitance) @ 1.5 V i.e. after the beam is pulled in. But the value of C11 displayed is wrong. I know theoretically it should be > 13 fF, but it is displaying 0.72 fF (which is the roughly its off-state value). I even followed an application example "rf-mems-switch" and obtained capacitance after applying step voltage (Transient study), but displayed the same wrong value. I don't know where I am going wrong. Is there any one who faced similar issue?.
I am simulating a MEMS capacitor. The pull-in voltage of the device is 1.5V. I used the stationary study to find out the C11(terminal capacitance) @ 1.5 V i.e. after the beam is pulled in. But the value of C11 displayed is wrong. I know theoretically it should be > 13 fF, but it is displaying 0.72 fF (which is the roughly its off-state value). I even followed an application example "rf-mems-switch" and obtained capacitance after applying step voltage (Transient study), but displayed the same wrong value. I don't know where I am going wrong. Is there any one who faced similar issue?.
1 Reply Last Post 03.09.2016, 15:16 GMT-4
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Posted:
8 years ago
To be very clear, I am trying to get the C-V curve of the MEMS capacitive switch. I have used the electromechanics module in COMSOL which combines both electrostatics & structural mechanics. After the pull-in point, the capacitance should vary abruptly, which is not happening in my case.